
3–128
Motorola Sensor Device Data
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ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING
Figure 2 shows the sensor output signal relative to pres-
sure input. Typical, minimum, and maximum output curves
are shown for operation over a temperature range of 0
°
to
85
°
C using the decoupling circuit shown in Figure 4. The
output will saturate outside of the specified pressure range.
The performance over temperature is achieved by integrat-
ing the shear–stress strain gauge, temperature compensa-
tion, calibration and signal conditioning circuitry onto a single
monolithic chip.
Figure 3 illustrates the differential or gauge configuration in the
basic chip carrier (Case 867). A fluoro silicone gel isolates the
die surface and wire bonds from harsh environments, while al-
lowing the pressure signal to be transmitted to the silicon dia-
phragm.
The MPX5999D pressure sensor operating characteristics,
and internal reliability and qualification tests are based on use
of dry air as the pressure media. Media other than dry air may
have adverse effects on sensor performance and long–term
reliability. Contact the factory for information regarding media
compatibility in your application.
Figure 4 shows the recommended decoupling circuit for
interfacing the output of the integrated sensor to the A/D in-
put of a microprocessor or microcontroller. Proper decoup-
ling of the power supply is recommended.
MAX
Figure 2. Output versus Pressure Differential
DIFFERENTIAL PRESSURE (kPa)
5.0
4.0
3.0
2.0
0
1100
700
300
0
O
900
500
4.5
3.5
2.5
1.5
100
TRANSFER FUNCTION:
Vout = VS*0.000901*P+0.04)
±
ERROR
VS = 5.0 Vdc
TEMP = 0 to 85
°
C
1.0
0.5
1000
600
200
800
400
MIN
TYPICAL
éééééééééééé
éééééééééééé
éééééééééééé
éééééééééééé
FRAME
SILICONE
DIE COAT
LEAD
STAINLESS STEEL
METAL COVER
BOND
DIE
WIRE BOND
Figure 3. Cross–Sectional Diagram
(Not to Scale)
THERMOPLASTIC CASE
Figure 4. Recommended power supply decoupling
and output filtering.
For additional output filtering, please refer to
Application Note AN1646.
1.0 F
IPS
470 pF
OUTPUT
Vs
5 V
0.01 F
GND
Vout
F
Freescale Semiconductor, Inc.
n
.