3–99
Motorola Sensor Device Data
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ON–CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING
The performance over temperature is achieved by integrat-
ing the shear–stress strain gauge, temperature compensa-
tion, calibration and signal conditioning circuitry onto a single
monolithic chip.
Figure 2 illustrates the Differential or Gauge configuration in
the basic chip carrier (Case 482). A fluorosilicone gel isolates
the die surface and wire bonds from the environment, while
allowing the pressure signal to be transmitted to the sensor
diaphragm.
The MPX5010 and MPXV5010G series pressure sensor
operating characteristics, and internal reliability and qualifi-
cation tests are based on use of dry air as the pressure me-
dia. Media, other than dry air, may have adverse effects on
sensor performance and long–term reliability. Contact the
factory for information regarding media compatibility in your
application.
Figure 3 shows the recommended decoupling circuit for in-
terfacing the integrated sensor to the A/D input of a micropro-
cessor or microcontroller. Proper decoupling of the power
supply is recommended.
Figure 4 shows the sensor output signal relative to pres-
sure input. Typical, minimum, and maximum output curves
are shown for operation over a temperature range of 0
°
to
85
°
C using the decoupling circuit shown in Figure 4. The
output will saturate outside of the specified pressure range.
Figure 2. Cross–Sectional Diagram SOP
(Not to Scale)
Figure 3. Recommended power supply decoupling
and output filtering.
For additional output filtering, please refer to
Application Note AN1646.
1.0 F
IPS
470 pF
OUTPUT
Vs
5 V
0.01 F
GND
Vout
FLUOROSILICONE
GEL DIE COAT
WIRE BOND
DIFFERENTIAL SENSING
ELEMENT
THERMOPLASTIC
CASE
STAINLESS
STEEL CAP
LEAD
FRAME
P1
P2
DIE BOND
DIE
DIFFERENTIAL PRESSURE (kPa)
5.0
4.0
3.0
2.0
0
11
7
3
0
O
9
5
4.5
3.5
2.5
1.5
1
1.0
0.5
10
6
2
8
4
TRANSFER FUNCTION:
Vout = VS*0.09*P+0.04)
±
ERROR
VS = 5.0 Vdc
TEMP = 0 to 85
°
C
TYPICAL
MAX
MIN
Figure 4. Output versus Pressure Differential
F
Freescale Semiconductor, Inc.
n
.