參數(shù)資料
型號(hào): TSS461
英文描述: Van Controller Serial Interface
中文描述: 范控制器串行接口
文件頁(yè)數(shù): 4/24頁(yè)
文件大?。?/td> 215K
代理商: TSS461
Qualpack TS80C31X2/C32X2
4
Rev. 2 – January 1999
3. Technology Information
3.1 Wafer Process Technology
Process type (Name):
Base material:
Wafer Thickness (final)
Wafer diameter
Number of masks
Gate oxide
Material
Thickness
Polysilicon
Number of layers
Thickness
Metal
Number of layers
Layer 1 material
Layer 1 thickness
Layer 2 material
Layer 2 thickness
Passivation
Material
Thickness
CMOS (SCMOS1/2 - Z86E)
Silicon Epi substrate type
475um
150mm
13
Silicon dioxide
195 A
1
3000 A
2
TiN/W
600 + 5000 A
Ti/AlCu
7000 A
Si
3
N
4
on SiO2
10000 A
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