Qualpack TSC87251G2D
2 Rev 0 – October 1999
1. General Information...........................................................................................................................3
1.1 Product Description............................................................................................................................3
2. Technology Information.....................................................................................................................4
2.1 Wafer Process Technology.................................................................................................................4
2.1.1 SCMOS3 0.5um ROM Process ...................................................................................................4
2.1.2 SCMOS3 NV 0.5um EPROM Process .........................................................................................6
2.2 Product Design ..................................................................................................................................6
2.3 Package Technology..........................................................................................................................6
2.3.1 Package description...................................................................................................................6
2.3.2 Other available packages............................................................................................................7
2.4 Test ..................................................................................................................................................7
2.5 Device Cross Section.........................................................................................................................8
2.6 Wafer Process Control........................................................................................................................9
3. Qualification ....................................................................................................................................10
3.1 Change Procedure...........................................................................................................................11
3.2 Qualification Flow.............................................................................................................................12
3.3 Wafer Process Qualification..............................................................................................................13
3.3.1 Process Module Reliability........................................................................................................13
3.3.1.1 Hot carrier qualification..............................................................................................................................................13
3.3.1.2 Electromigration..........................................................................................................................................................15
3.3.1.3 Time Dependent Dielectric Breakdown..................................................................................................................16
3.3.2 Z92 Wafer Process Qualification Results ...................................................................................18
3.3.3 Z94 Wafer Process Qualification Results ...................................................................................19
3.4 Package Qualification.......................................................................................................................20
3.5 Device Qualification..........................................................................................................................20
3.5.1 Failure Mechanisms and Corrective Actions ...............................................................................21
3.5.2 Qualification status ...................................................................................................................21
3.6 Outgoing Quality and Reliability ........................................................................................................22
3.6.1 AOQ (Average Outgoing Quality)...............................................................................................22
3.6.2 EFR (Early Failure Rate)...........................................................................................................22
3.6.3 LFR (Latent Failure Rate)..........................................................................................................23
4. User Information..............................................................................................................................24
4.1 Soldering Recommendations ............................................................................................................24
4.2 DRY PACK Ordering rules................................................................................................................24
4.3 ESD caution.....................................................................................................................................24
5. Environmental Information ..............................................................................................................25
6. Other Data........................................................................................................................................26
6.1 ISO9001 Approval Certificate............................................................................................................26
6.2 Databook Reference........................................................................................................................27
6.3 Address Reference...........................................................................................................................27
7. Revision History...............................................................................................................................28