參數(shù)資料
型號(hào)： S10043
廠商： Hamamatsu Photonics
英文描述： Highly reliable photodiode for VUV detection
中文描述： 高度可靠的光電二極管的真空紫外檢測
文件頁數(shù)： 1/2頁
文件大?。?/td> 51K
代理商： S10043
P H O T O D I O D E
Si photodiode
S10043
Highly reliable photodiode for VUV detection
S10043 is a Si photodiode designed to detect high-power ArF excimer lasers (193 nm) with high accuracy and stability. By combining our
newly developed technologies for forming ultra-thin PN junctions and high-reliability ultra-thin metal films, S10043 shows almost no change
in sensitivity even after exposure to ArF excimer laser beam of 1 kJ/cm
2
.
Features
Applications
l
Greatly improved sensitivity stability even after exposure
to ArF (
λ
=193 nm) excimer laser
l
Windowless package *
1
l
ArF excimer laser detection
l
Various UV detection
1
I
Absolute maximum ratings (Ta=25 °C)
Parameter
Reverse voltage
Operating temperature *
2
Storage temperature *
2
Symbol
V
R
Max.
Topr
Tstg
Value
5
-20 to +60
-55 to +80
Unit
V
°C
°C
I
Electrical and optical characteristics (Ta=25 °C)
Parameter
Spectral response range
Peak sensitivity wavelength
Photo sensitivity
Dark current
Terminal capacitance
Symbol
λ
λ
p
S
I
D
Ct
Condition
Min.
-
-
10
-
-
Typ.
Max.
-
-
-
1
-
Unit
nm
nm
mA/W
nA
nF
190 to 1000
720
15
0.1
4
λ
=193 nm
V
R
=10 mV
V
R
=0 V, f=10 kHz
V
R
=0 V, R
L
=1 k
10 to 90 %
Rise time
tr
-
9
-
μs
*1: S10043 uses a windowless package with no protection on the photodiode chip, and is shipped with the package held with
glass tape. Remove the glass tape when using.
*2: No condensation
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