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參數(shù)資料
| 型號： | S9089 |
| 元件分類： | 光敏二極管 |
| 英文描述： | PHOTO DIODE |
| 封裝： | HERMETIC SEALED, TO-8, 2 PIN |
| 文件頁數(shù)： | 1/2頁 |
| 文件大?。?/td> | 134K |
| 代理商： | S9089 |
Features
Applications
PHOTODIODE
Si photodiode
Highly reliable quartz window photodiode for VUV detection
S9089
S9089 is a VUV (vacuum ultraviolet) sensitive Si photodiode ideal for ArF (
λ=193 nm) excimer laser detection. Compared to conventional types,
S9089 offers improved sensitivity stability against VUV irradiation. The package is hermetically sealed by a newly developed quartz window that
keeps it fully airtight and highly reliable. This package is also easier to handle than S8551 windowless type photodiode.
l Highly reliable quartz window
l High reliable detection of ArF excimer laser (λ=193 nm)
l Active area: 5.8 × 5.8 mm
l TO-8 metal package
l ArF (λ=193 nm), KrF (λ=248 nm) excimer laser
measurement
l UV light detection, etc.
1
I Absolute maximum ratings (Ta=25 °C)
Parameter
Symbol
Value
Unit
Reverse voltage
VR Max.
5
V
Operating temperature
Topr
-40 to +100
°C
Storage temperature
Tstg
-55 to +125
°C
I Electrical and optical characteristics (Ta=25 °C)
Parameter
Symbol
Condition
Min.
Typ.
Max.
Unit
Spectral response range
l
-
190 to 1000
-
nm
Peak sensitivity wavelength
lp
-
780
-
nm
l=193 nm
0.04
0.06
-
A/W
Photo sensitivity
S
l=800 nm
0.4
0.5
-
A/W
Dark current
ID
VR=10 mV
-
0.02
0.5
nA
Rise time
tr
VR=0 V, RL=1 kW
l=655 nm, 10 to 90 %
-
2
-
s
Terminal capacitance
Ct
VR=0 V, f=10 kHz
-
0.7
-
nF
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