參數(shù)資料
型號: S8553
廠商: Hamamatsu Photonics
英文描述: Photodiodes for VUV (Vacuum UV) detection
中文描述: 光電二極管的真空紫外(真空紫外)檢測
文件頁數(shù): 1/2頁
文件大?。?/td> 116K
代理商: S8553
S8551, S8552 and S8553 are VUV (Vacuum UV) photodiodes suitable for detection of ArF excimer lasers (
λ
=193 nm). Designed to provide
optimal performance in the VUV range, these photodiodes offer more stable sensitivity even after long exposure to VUV radiation compared with
conventional types.
Features
l
Reliable detection improves of ArF excimer laser
(
λ
=193 nm)
l
Large active area
S8551: 5.8 × 5.8 mm
S8552: 10 × 10 mm
S8553: 18 × 18 mm
l
Windowless package
S8551: TO-8 metal package
S8552: 16.5 × 15.0 mm ceramic package
S8553: 25.5 × 25.5 mm ceramic package
Applications
l
ArF excimer laser detection
l
Detection of various UV light sources
P H O T O D I O D E
Si photodiode
S8551, S8552, S8553
Photodiodes for VUV (Vacuum UV) detection
1
I
Absolute maximum ratings (Ta=25
°
C)
Parameter
Reverse voltage
Operating temperature
Storage temperature
* No condensation
Symbol
V
R
Max.
Topr
Tstg
Value
5
Unit
V
°
C
°
C
-20 to +60 *
-55 to +80 *
I
Electrical and optical characteristics (Ta=25
°
C)
S8551
Typ.
60
0.02
S8552
Typ.
60
0.05
S8553
Typ.
60
0.1
Parameter
Symbol
Condition
Min.
45
-
Max.
-
0.5
Min.
45
-
Max.
-
1.0
Min.
45
-
Max.
-
5.0
Unit
Photo sensitivity
Dark current
Terminal
capacitance
S
I
D
λ
=193 nm
V
R
=10 mV
mA/W
nA
Ct
V
R
=0 V, f=10 kHz
-
1.0
-
-
4.0
-
-
8.0
-
nF
Rise time
tr
V
R
=0 V, R
L
=1 k
10 to 90 %
-
2
-
-
9
-
-
18
-
μs
S8551, S8552 and S8553 use windowless packages with no protection on the photodiode chip. Always use the following
precautions when handling these photodiodes.
I
Handling precautions
G
Handle the photodiodes in a clean room.
G
Never touch the photodiode chip surface and wire bonding.
G
Wear dust-proof gloves and dust-proof mask.
G
Use an air dust cleaner to blow away dust and foreign matter on the photodiode chip surface.
G
Do not clean the photodiodes by any method other than air blow.
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