產(chǎn)品信息


Amphenol.Nova sensor無封裝產(chǎn)品晶圓/晶片/裸片P330

main P330 image 02

 


Amphenol Advanced Sensors’ P330 piezoresistive pressure die offers the same superior stability and sensitivity as in larger chips, but in an extremely small footprint for invasive applICations where small size is critical. It has excellent measurement accuracy, which is ideal for demanding applications with restricted dimensional profiles such as medical catheters and IC packages. NovaSensor’s proprietary SenStable? process provides excellent long term stability and repeatability.


Features

Extremely small size: 330 x 180 μm cross section
Stable accurate pressure measurement
Low powerconsumption using high impedance
Absolute pressure sensing
Standard pressure range of 450 to 1050 mmHgA
4500 mmHgA burst pressure
Gold wire bond pads

Applications

Cardiovascular
Respiratory
Intracranial
Urological/ Rectal
Ablation
Body Cavity
Research

Notes

  1. Values measured at 22°C (72°F) unless noted with 3000 ohm resistors completing the bridge.
  2. Pressure sensor performance can be affected by die mounting. Packaging stress should be minimized to achieve the specified performance.
  3. Proof Pressure: The maximum pressure at which the sensor may be subjected as an uncommon event and for a short duration of time without permanent damage or performance degradation. If the Proof Pressure is exceeded, the die performance is no longer guaranteed.
  4. Burst Pressure: The pressure at which permanent damage to the sensor may occur. Specification is for quasi-static pressure in an oil medium applied to the diaphragm side of the die.
  5. Parameter is measured at the wafer-level 100% at room temperature, atmospheric pressure and 3V.
  6. Symmetry is calculated as 2*(r1 – r2)/(r1 + r2), where r1 and r2 are two piezoresistors measured separately.
  7. Parameters marked “Typical” are verified by testing samples from each wafer. TCR of sensor resistors only. TCR of bridge circuit will be affected by the resistor values completing the bridge.
  8. Die is capable beyond this range with additional validation.
  9. Die with protective layers has been successfully used in various medical and biological applications.
  10. If the sensor is to be exposed to radiation, it is recommended to shield the die from radiation and implement auto-zeroing.
Parameter (Note 1,2) Unit Value Comment
Pressure Range mmHg 450 to 1050 Absolute pressure
Proof Pressure3 mmHg 2700
Burst Pressure4 mmHg 4500
Excitation Volts 1 to 6 DC Voltage
Bridge Resistance5 kohm 3.2±1.0  
Symmetry6 % ±5  
Offset Voltage7 mV/V 4.5 Typical @ 750
mmHg
Sensitivity7 μV/V/mmHg 10 Typical
Pressure Non Linearity7 % ±1 Typical TBNL,
300 mmHg
Range
TC Offset7 μV/V/°C ±40 Maximum
TC Sensitivity7 %/°C -0.2 Typical
TC Resistance7 %/°C 0.05 Typical
Operating Temperature8 °C 15 to 45 59 to 113°F
Storage Temperature °C -25 to 70 -13 to 158°F
Media Compatibility 9, 10 Clean, dry and non-corrosive gases

Layout and Configuration

P330 layout
P330 Schematic Diagram: Complete the full bridge by inserting two 3000 ohm external resistors. Match resistors closely to minimize offset error. For +IN, both sides of the split pad must be connected for proper operation.
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