3–1
Motorola Sensor Device Data
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Section Three
General Information:
Pressure Sensor Overview
Motorola’s pressure sensors are silicon micromachined, elec-
tromechanical devices featuring device uniformity and con-
sistency, high reliability, accuracy and repeatability at
competitively low costs. With more than 20 years in pressure
sensor engineering, technology development and manufac-
turing, these pressure sensors have been designed into auto-
motive, industrial, healthcare, commercial and consumer
products worldwide.
Pressure sensors operate in pressures up to 150psi (1000
kPa). For maximum versatility, Motorola pressure sensors are
single silicon, piezoresistive devices with three levels of de-
vice sophistication. The basic sensor device provides uncom-
pensated sensing, the next level adds device compensation
and the third and most value added pressure sensors are the
integrated devices. Compensated sensors are available in
temperature compensated and calibrated configurations; inte-
grated devices are available in temperature compensated,
calibrated and signal conditioned (or amplified) configura-
tions. Each sensor family is available in gauge, absolute and
differential pressure references in a variety of packaging and
porting options.
Mini Selector Guide
3–2
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Device Numbering System
3–4
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Package Offerings
3–5
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Orderable Part Numbers
3–6
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Pressure Sensor Overview
General Information
Motorola Pressure Sensors
Integration
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Sensor Applications
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Pressure Sensor FAQ’s
3–7
3–8
3–12
3–13
3–14
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Data Sheets
3–15
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Application Notes
3–188
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Case Outlines
3–423
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Reference Information
Reference Tables
Mounting and Handling Suggestions
Standard Warranty Clause
3–439
3–441
3–442
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Glossary of Terms
3–443
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Symbols, Terms and Definitions
3–446
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Freescale Semiconductor, Inc.
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