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參數(shù)資料
| 型號： | F2223-21SH |
| 廠商： | Hamamatsu Photonics |
| 英文描述： | MCP ASSEMBLY |
| 中文描述： | MCP的大會 |
| 文件頁數(shù)： | 1/2頁 |
| 文件大?。?/td> | 118K |
| 代理商： | F2223-21SH |
GENERAL
SPECIFICATIONS
FEATURES
G
High Sensitivity
G
High S/N Ratio
G
Wide Dynamic Range
G
Center Hole for Beam Line
G
Compact and Lightweight
APPLICATIONS
G
Scanning Electron Microscopy
G
Scanning Ion Microscopy
G
Electron Lithography
G
Mask Aligner
G
Electron Beam Measuring System
G
Ion Scattering Spectroscopy
Parameter
Value
56.5
27.0
8.6
12
2
8
Unit
mm
mm
mm
μ
m
—
mm
Assembly Outer Size
Effective Area
Height (Max.)
MCP Channel Diameter
Number of MCPs
MCP Center Dead Area
RATINGS
MCP Supply Voltage (Max.)
MCP-Out to Anode Supply Voltage (Max.)
Mesh to MCP-In Supply Voltage
Anode to Substrate Supply Voltage
Operating Vacuum Condition (Max.)
Ambient Temperature
Baking Temperature
Baking Time
Vacuum Condition for Baking (Max.)
TYPICAL ELECTRICAL CHARACTERISTICS (Supply Voltage: 2 kV, Vacuum: 1.3
×
10
-4
Pa, Operating Ambient Temperature: +25
°
C)
Gain at 1.8 kV (Min.)
Plate Resistance
Maximum Linear Output
Dark Current
kV
kV
kV
kV
Pa
°
C
°
C
Hours
Pa
2
0.5
0.5
3
1.3
×
10
-4
+10 to +40
300
10
1.3
×
10
-4
—
M
/ MCP
—
pA·cm
-2
1
×
10
6
20 to 40
7 % of strip current under uniform input into whole MCP effective area
20
MCP ASSEMBLY
F2223-21SH
This MCP assembly is a suitable detector for an electron or ion
beam in SEM, SIM or Lithography.
It is possible to detect some signal from a sample with high sensitivi-
ty, that can be performed with the compactness and the center hole
of this assembly. It allows to set this assembly at close position to
the sample and gives better efficiency in the beam detection.
TMCPF0020
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are
subject to change without notice. No patent rights are granted to any of the circuits described herein. 2006 Hamamatsu Photonics K.K.
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
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