參數(shù)資料
型號: ADXL50AH
廠商: ANALOG DEVICES INC
元件分類: 模擬信號調(diào)理
英文描述: Monolithic Accelerometer With Signal Conditioning
中文描述: SPECIALTY ANALOG CIRCUIT, MBCY10
封裝: HERMETIC SEALED, METAL CAN, TO-100, 10 PIN
文件頁數(shù): 8/16頁
文件大?。?/td> 286K
代理商: ADXL50AH
ADXL50
–8–
REV. B
T HE ORY OF OPE RAT ION
T he ADX L50 is a complete acceleration measurement system
on a single monolithic IC. It contains a polysilicon surface-mi-
cro machined sensor and signal conditioning circuitry. T he
ADX L50 is capable of measuring both positive and negative ac-
celeration to a maximum level of
±
50 g.
Figure 16 is a simplified view of the ADX L50’s acceleration
sensor at rest. T he actual structure of the sensor consists of 42
unit cells and a common beam. T he differential capacitor sensor
consists of independent fixed plates and a movable “floating”
central plate which deflects in response to changes in relative
motion. T he two capacitors are series connected, forming a ca-
pacitive divider with a common movable central plate. A force
balance technique counters any impeding deflection due to ac-
celeration and servos the sensor back to its 0 g position.
CS1
CS2
CENTER
PLATE
FIXED
OUTER
PLATES
UNIT CELL
CS1 = CS2
BEAM
TETHER
CS1
CS2
CENTER
PLATE
TOP VIEW
DENOTES ANCHOR
Figure 16. A Simplified Diagram of the ADXL50 Sensor at
Rest
Figure 17 shows the sensor responding to an applied accelera-
tion. When this occurs, the common central plate or “beam”
moves closer to one of the fixed plates while moving further
from the other. T he sensor’s fixed capacitor plates are driven
deferentially by a 1 MHz square wave: the two square wave am-
plitudes are equal but are 180
°
out of phase from one another.
When at rest, the values of the two capacitors are the same and
therefore, the voltage output at their electrical center (i.e., at the
center plate) is zero.
When the sensor begins to move, a mismatch in the value of
their capacitance is created producing an output signal at the
central plate. T he output amplitude will increase with the
amount of acceleration experienced by the sensor. Information
concerning the direction of beam motion is contained in the
phase of the signal with synchronous demodulation being used
to extract this information. Note that the sensor needs to be po-
sitioned so that the measured acceleration is along its sensitive
axis.
Figure 18 shows a block diagram of the ADX L50. T he voltage
output from the central plate of the sensor is buffered and then
applied to a synchronous demodulator. T he demodulator is also
supplied with a (nominal) 1 MHz clock signal from the same
oscillator which drives the fixed plates of the sensor. T he
demodulator will rectify any voltage which is in sync with its
clock signal. If the applied voltage is in sync and in phase with
the clock, a positive output will result. If the applied voltage is in
sync but 180
°
out of phase with the clock, then the demodu-
lator’s output will be negative. All other signals will be rejected.
An external capacitor, C1, sets the bandwidth of the demodulator.
T he output of the synchronous demodulator drives the preamp
—an instrumentation amplifier buffer which is referenced to
+1.8 volts. T he output of the preamp is fed back to the sensor
through a 3 M
isolation resistor. T he correction voltage re-
quired to hold the sensor’s center plate in the 0 g position is a
direct measure of the applied acceleration and appears at the
V
PR
pin.
CS1
CS2
UNIT CELL
CS1 < CS2
BEAM
TOP VIEW
DENOTES ANCHOR
APPLIED
ACCELERATION
Figure 17. The ADXL50 Sensor Momentarily Responding
to an Externally Applied Acceleration
When the ADX L50 is subjected to an acceleration, its capacitive
sensor begins to move creating a momentary output signal. T his
is signal conditioned and amplified by the demodulator and
preamp circuits. T he dc voltage appearing at the preamp output
is then fed back to the sensor and electrostatically forces the
center plate back to its original center position.
At 0 g the ADX L50 is calibrated to provide +1.8 volts at the
V
PR
pin. With an applied acceleration, the V
PR
voltage changes
to the voltage required to hold the sensor stationary for the du-
ration of the acceleration and provides an output which varies
directly with applied acceleration.
T he loop bandwidth corresponds to the time required to apply
feedback to the sensor and is set by external capacitor C1. T he
loop response is fast enough to follow changes in g level up to
and exceeding 1 kHz. T he ADX L50’s ability to maintain a flat
response over this bandwidth keeps the sensor virtually motion-
less. T his essentially eliminates any nonlinearity or aging effects
due to the sensor beam’s mechanical spring constant, as com-
pared to an open-loop sensor.
An uncommitted buffer amplifier provides the capability to ad-
just the scale factor and 0 g offset level over a wide range. An in-
ternal reference supplies the necessary regulated voltages for
powering the chip and +3.4 volts for external use.
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